产品列表

即时液体浓度分析仪

 

适合半导体/印刷电路板/面板等产业

 

MC-LIQ-1700 系列

 

● 兆晶致力于光谱材料分析技术, 为客户提供光学式的即时液体成分分析设备,可以协助客户即时监控化学槽内工作液的各种酸/碱/有机等成分比例,有助于制程稳定性的提升, 以及节省药水

 

 

 

 

特色:


  

1.非接触式即时检测,不污染不损耗药水
2.检测快速,不须耗材,维护简单
3.可全网连接,即时上传检测结果
4.可检测高温药水
5.多种混和药液亦可检测
6.配有多种型号供不同液体分析检测用

 


MC-LIQ-1700系列适用于多数酸/碱工作液
透过帮浦将药水通入分析仪内,以光学方式即时检测出成分含量, 透过工业 4.0 将数据提供客户端进行自动补液,可以大幅提升产品良率, 在蚀刻/化镀/电镀/清洗/显影/去光阻/棕化/粗化 等制程都适用


                                          

Illustration of the monitoring process:

 

The non-intrusive designed monitoring system offers real-time detection without contaminating the testing substance.  Tested fluid passes through a hyperspectral engine surrounded glass tube which resides in the central test station.  The composition of a chemical compound or substance is immediately analyzed and updated to the cloud platform.

 

Illustration of the system architecture:

 

The wireless concentration monitor allows a fast and easy expansion process, just connects the fluid to the system, the measured data will transmit to a central monitor for analysis and management.  The system allows expansion over hundreds of additional test nodes through a simple system setup via system management software suite.

 

Applications:

 

Highly customizable architecture to meet today’s highest production standard.  The system covers a wide range of chemicals used in the semiconductor process, and optional chemical database expansion suite offers simple system upgrade.

                           



Specification:

 

The basic version consists one fluid channels, and a cloud monitoring platform.  Mega Crystal provides complimentary installation, validation and all-year-round technical service.  Mega Crystal offers paid database expansion service, for more information please consult Mega Crystal sales team directly.