● 兆晶致力于光谱材料分析技术, 为客户提供光学式的即时液体成分分析设备,可以协助客户即时监控化学槽内工作液的各种酸/碱/有机等成分比例,有助于制程稳定性的提升, 以及节省药水
透过帮浦将药水通入分析仪内,以光学方式即时检测出成分含量, 透过工业 4.0 将数据提供客户端进行自动补液,可以大幅提升产品良率, 在蚀刻/化镀/电镀/清洗/显影/去光阻/棕化/粗化 等制程都适用
Illustration of the monitoring process:
The non-intrusive designed monitoring system offers real-time detection without contaminating the testing substance. Tested fluid passes through a hyperspectral engine surrounded glass tube which resides in the central test station. The composition of a chemical compound or substance is immediately analyzed and updated to the cloud platform.
Illustration of the system architecture:
The wireless concentration monitor allows a fast and easy expansion process, just connects the fluid to the system, the measured data will transmit to a central monitor for analysis and management. The system allows expansion over hundreds of additional test nodes through a simple system setup via system management software suite.
Highly customizable architecture to meet today’s highest production standard. The system covers a wide range of chemicals used in the semiconductor process, and optional chemical database expansion suite offers simple system upgrade.
The basic version consists one fluid channels, and a cloud monitoring platform. Mega Crystal provides complimentary installation, validation and all-year-round technical service. Mega Crystal offers paid database expansion service, for more information please consult Mega Crystal sales team directly.